ETRI-Knowledge Sharing Plaform

ENGLISH

성과물

특허 검색
구분 출원국
출원년도 ~ 키워드

상세정보

등록 산화물 박막 제조기술

산화물 박막 제조기술
이미지 확대
발명자
김경현, 김제하, 정용덕, 최해원, 조대형
출원번호
13530370 (2012.06.22)
공개번호
20130095600 (2013.04.18)
등록번호
8647916 (2014.02.11)
출원국
미국
협약과제
11MB3100, 반응성 스퍼터링을 이용한 CIGS 초박막 고효율 태양전지 기술 개발, 김제하
초록
Methods for manufacturing a solar cell are provided. The method may include forming a lower electrode on a substrate, forming a light absorption layer on the lower electrode, forming a buffer layer on the light absorption layer, and forming a window layer on the buffer layer. The window layer may include an intrinsic layer and the transparent electrode which have electric characteristics different from each other, respectively. The intrinsic layer and the transparent electrode may be formed by a sputtering process using a single target formed of metal oxide doped with impurities.
KSP 제안 키워드
Absorption layer, Buffer layer, Light absorption, Metal-oxide(MOX), Single target, Solar Cells, electric characteristics, intrinsic layer, light absorption layer, sputtering process, transparent electrode, window layer