상세정보
등록 광 검출기의 형성 방법
- 출원번호
- 13612736 (2012.09.12)
- 공개번호
- 20130149806 (2013.06.13)
- 등록번호
- 8859319 (2014.10.14)
- 출원국
- 미국
- 협약과제
- 11VB1100, 실리콘 나노포토닉스 기반 차세대 컴퓨터 칩기술, 김경옥
- 초록
- Methods of forming photo detectors are provided. The method includes providing a semiconductor layer on a substrate, forming a trench in the semiconductor layer, forming a first single crystalline layer and a second single crystalline layer using a selective single crystalline growth process in the trench, and patterning the first and second single crystalline layers and the semiconductor layer to form a first single crystalline pattern, a second single crystalline pattern and an optical waveguide.
- KSP 제안 키워드
- Crystalline growth, Growth process, Optical waveguides, Single-crystalline, photo detector