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Registered METHODS OF FORMING PHOTO DETECTORS

광 검출기의 형성 방법
이미지 확대
Inventors
Kim Sang Hoon, In Gyoo Kim, Kim Gyungock, Jiho Joo, Jang Ki Seok
Application No.
13612736 (2012.09.12)
Publication No.
20130149806 (2013.06.13)
Registration No.
8859319 (2014.10.14)
Country
UNITED STATES
Project Code
11VB1100, Silicon Nanophotonics-based next-generation computer chip, Kim Gyungock
Abstract
Methods of forming photo detectors are provided. The method includes providing a semiconductor layer on a substrate, forming a trench in the semiconductor layer, forming a first single crystalline layer and a second single crystalline layer using a selective single crystalline growth process in the trench, and patterning the first and second single crystalline layers and the semiconductor layer to form a first single crystalline pattern, a second single crystalline pattern and an optical waveguide.