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Detail
Registered METHODS OF FORMING PHOTO DETECTORS
- Inventors
- Kim Sang Hoon, In Gyoo Kim, Kim Gyungock, Jang Ki Seok, Jiho Joo
- Application No.
- 13612736 (2012.09.12)
- Publication No.
- 20130149806 (2013.06.13)
- Registration No.
- 8859319 (2014.10.14)
- Country
- UNITED STATES
- Project Code
- 11VB1100, Silicon Nanophotonics-based next-generation computer chip, Kim Gyungock
- Abstract
- Methods of forming photo detectors are provided. The method includes providing a semiconductor layer on a substrate, forming a trench in the semiconductor layer, forming a first single crystalline layer and a second single crystalline layer using a selective single crystalline growth process in the trench, and patterning the first and second single crystalline layers and the semiconductor layer to form a first single crystalline pattern, a second single crystalline pattern and an optical waveguide.
- KSP Keywords
- Crystalline growth, Growth process, Optical waveguides, Single-crystalline, photo detector