Registered
VERTICAL CAPACITORS AND METHODS OF FORMING THE SAME
- Inventors
-
Kim Seong-Il, Jong-Won Lim, Hyung Sup Yoon, Jongmin Lee, Mun Jae Kyoung, Lee Sang-Heung, Eun Soo Nam, Min Byoung-Gue
- Application No.
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13618873 (2012.09.14)
- Publication No.
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20130134554 (2013.05.30)
- Registration No.
- 8853821 (2014.10.07)
- Country
- UNITED STATES
- Project Code
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11ZB1100, Development support for customer-based convergence components,
Eun Soo Nam
- Abstract
- Provided are vertical capacitors and methods of forming the same. The formation of the vertical capacitor may include forming input and output electrodes on a top surface of a substrate, etching a bottom surface of the substrate to form via electrodes, and then, forming a dielectric layer between the via electrodes. As a result, a vertical capacitor with high capacitance can be provided in a small region of the substrate.
- KSP Keywords
- Bottom surface, dielectric layer, high capacitance, input and output
- Family
-