상세정보
등록 모드 크기 변환기 및 그의 제조방법
- 출원번호
- 13618353 (2012.09.14)
- 공개번호
- 20130266263 (2013.10.10)
- 등록번호
- 9036969 (2015.05.19)
- 출원국
- 미국
- 협약과제
- 11MB2400, 100G 이더넷용 광송수신기 개발, 백용순
- 초록
- Provided are a spot size converter and a method of manufacturing the spot size converter. The method includes stacking a lower clad layer, a core layer, and a first upper clad layer on a substrate, tapering the first upper clad layer and the core layer in a first direction on a side of the substrate, forming a waveguide layer on the first upper clad layer and the lower clad layer, and etching the waveguide layer, the first upper clad layer, the core layer, and the lower clad layer such that the waveguide layer is wider than a tapered portion of the core layer on the side of the substrate and has the same width as that of the core layer on another side of the substrate.