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Registered SPOT SIZE CONVERTERS AND METHODS OF MANUFACTURING THE SAME

모드 크기 변환기 및 그의 제조방법
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Inventors
Kwon Oh Kee, Baek Yongsoon, Chul-Wook Lee, Lee Dong-Hun, 정윤철, Han Young-Tak, Leem Young Ahn
Application No.
13618353 (2012.09.14)
Publication No.
20130266263 (2013.10.10)
Registration No.
9036969 (2015.05.19)
Country
UNITED STATES
Project Code
11MB2400, 100G Optical Transceivers for Ethernet, Baek Yongsoon
Abstract
Provided are a spot size converter and a method of manufacturing the spot size converter. The method includes stacking a lower clad layer, a core layer, and a first upper clad layer on a substrate, tapering the first upper clad layer and the core layer in a first direction on a side of the substrate, forming a waveguide layer on the first upper clad layer and the lower clad layer, and etching the waveguide layer, the first upper clad layer, the core layer, and the lower clad layer such that the waveguide layer is wider than a tapered portion of the core layer on the side of the substrate and has the same width as that of the core layer on another side of the substrate.
KSP Keywords
Clad layer, Spot size, Spot size converter(SSC)