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Detail
Registered VERTICAL-CAVITY SURFACE-EMITTING LASER AND METHOD OF FABRICATING THE SAME
- Inventors
- Song Hyun Woo, Kim Bong Kyu, Seunghwan Kim, Jung Moon Youn
- Application No.
- 13974891 (2013.08.23)
- Publication No.
- 20140079085 (2014.03.20)
- Registration No.
- 9054496 (2015.06.09)
- Country
- UNITED STATES
- Project Code
- 12MC1600, Core Technology Development of Laser Accelerated Ion-Beam Generation System for Cancer Therapy, Seunghwan Kim
- Abstract
- Provided are a wavelength swept vertical-cavity surface-emitting laser and a method of fabricating the same. The laser may include a substrate, a lower reflection layer on the substrate, an active layer on the lower reflection layer, a sacrificial layer disposed on a first side of the active layer, a stopper disposed on a second side of the active layer that may be spaced apart from the sacrificial layer, and an upper reflection layer fixed on the sacrificial layer, the upper reflection layer extending over the stopper and the active layer. The stopper defines a minimum separation distance between the upper reflection layer and the active layer.
- KSP Keywords
- Active Layer, Sacrificial layer, Separation distance, Surface-emitting laser, minimum separation, vertical-cavity surface-emitting laser(VCSEL)
- Family
| Status | Patent | Country | KIPRIS |
|---|---|---|---|
| Registered | Vertical-Cavity Surface Emitting Laser and manufacturing method for the same | KOREA | KIPRIS |