등록
수직공진 표면방출 레이저 및 그의 제조방법
- 발명자
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송현우, 김봉규, 김승환, 정문연
- 출원번호
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13974891 (2013.08.23)
- 공개번호
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20140079085 (2014.03.20)
- 등록번호
- 9054496 (2015.06.09)
- 출원국
- 미국
- 협약과제
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12MC1600, 종양치료용 레이저 이온 가속 시스템 원천 기술 개발,
김승환
- 초록
- Provided are a wavelength swept vertical-cavity surface-emitting laser and a method of fabricating the same. The laser may include a substrate, a lower reflection layer on the substrate, an active layer on the lower reflection layer, a sacrificial layer disposed on a first side of the active layer, a stopper disposed on a second side of the active layer that may be spaced apart from the sacrificial layer, and an upper reflection layer fixed on the sacrificial layer, the upper reflection layer extending over the stopper and the active layer. The stopper defines a minimum separation distance between the upper reflection layer and the active layer.
- KSP 제안 키워드
- Active Layer, Sacrificial layer, Separation distance, Surface-emitting laser, minimum separation, vertical-cavity surface-emitting laser(VCSEL)
- 패밀리
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