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Registered MEMS MICROPHONE USING NOISE FILTER

잡음 필터를 사용한 MEMS 마이크로폰
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Inventors
Kim Yi-Gyeong, Cho Min-Hyung, Roh Tae Moon, Kwon Jong-Kee, Yang Woo Seok, Kim Jongdae
Application No.
13762300 (2013.02.07)
Publication No.
20140079254 (2014.03.20)
Registration No.
8983090 (2015.03.17)
Country
UNITED STATES
Project Code
12MB2400, Development of self-powered smart sensor node platform for smart&green building, Kim Jongdae
Abstract
An MEMS microphone is provided which includes a reference voltage/current generator configured to generate a DC reference voltage and a reference current; a first noise filter configured to remove a noise of the DC reference voltage; a voltage booster configured to generate a sensor bias voltage using the DC reference voltage the noise of which is removed; a microphone sensor configured to receive the sensor bias voltage and to generate an output value based on a variation in a sound pressure; a bias circuit configured to receive the reference current to generate a bias voltage; and a signal amplification unit configured to receive the bias voltage and the output value of the microphone sensor to amplify the output value. The first noise filter comprises an impedance circuit; a capacitor circuit connected to a output node of the impedance circuit; and a switch connected to both ends of the impedance circuit.