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Registered MEMS MICROPHONE USING NOISE FILTER

잡음 필터를 사용한 MEMS 마이크로폰
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Inventors
Kim Yi-Gyeong, Kwon Jong-Kee, Roh Tae Moon, Cho Min-Hyung, Kim Jongdae, Yang Woo Seok
Application No.
13762300 (2013.02.07)
Publication No.
20140079254 (2014.03.20)
Registration No.
8983090 (2015.03.17)
Country
UNITED STATES
Project Code
12MB2400, Development of self-powered smart sensor node platform for smart&green building, Kim Jongdae
Abstract
An MEMS microphone is provided which includes a reference voltage/current generator configured to generate a DC reference voltage and a reference current; a first noise filter configured to remove a noise of the DC reference voltage; a voltage booster configured to generate a sensor bias voltage using the DC reference voltage the noise of which is removed; a microphone sensor configured to receive the sensor bias voltage and to generate an output value based on a variation in a sound pressure; a bias circuit configured to receive the reference current to generate a bias voltage; and a signal amplification unit configured to receive the bias voltage and the output value of the microphone sensor to amplify the output value. The first noise filter comprises an impedance circuit; a capacitor circuit connected to a output node of the impedance circuit; and a switch connected to both ends of the impedance circuit.
KSP Keywords
Bias voltage, Capacitor circuit, MEMS Microphone, Noise filters, Reference Voltage, Reference current, Sensor Bias, Sound pressure, bias circuit, current generator, microphone sensor, signal amplification, voltage booster