상세정보
등록 진동 소자 및 그 제조 방법
- 출원번호
- 14475487 (2014.09.02)
- 공개번호
- 20150061455 (2015.03.05)
- 등록번호
- 9650238 (2017.05.16)
- 출원국
- 미국
- 초록
- A vibration device including a supporting portion formed to cover both ends of a vibration region, and a method of manufacturing the vibration device are provided. The vibration device may include a lower substrate on which an insulating layer is formed, an upper substrate connected onto the insulating layer, and including a vibration region that vibrates and that is separated from the lower substrate by at least a predetermined distance, and a supporting portion formed to cover both ends of the vibration region, to support the vibration region.
- 패밀리
| 구분 | 특허 | 출원국 | KIPRIS |
|---|---|---|---|
| 등록 | 진동 소자 및 그 제조 방법 | 대한민국 | KIPRIS |