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Registered VIBRATION DEVICE AND METHOD OF MANUFACTURING VIBRATION DEVICE

진동 소자 및 그 제조 방법
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Inventors
Baek In Bok, Yu Han Young, Bong Kuk Lee, Jang Won Ick, Kim Yark Yeon, Yoon Yong Sun, Kim Young Jun, Chang-Geun Ahn, Lim Ji Eun
Application No.
14475487 (2014.09.02)
Publication No.
20150061455 (2015.03.05)
Registration No.
9650238 (2017.05.16)
Country
UNITED STATES
Abstract
A vibration device including a supporting portion formed to cover both ends of a vibration region, and a method of manufacturing the vibration device are provided. The vibration device may include a lower substrate on which an insulating layer is formed, an upper substrate connected onto the insulating layer, and including a vibration region that vibrates and that is separated from the lower substrate by at least a predetermined distance, and a supporting portion formed to cover both ends of the vibration region, to support the vibration region.
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Status Patent Country KIPRIS
Registered 진동 소자 및 그 제조 방법 KOREA KIPRIS