Registered
VIBRATION DEVICE AND METHOD OF MANUFACTURING VIBRATION DEVICE
- Inventors
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Baek In Bok, Yu Han Young, Bong Kuk Lee, Jang Won Ick, Kim Yark Yeon, Yoon Yong Sun, Kim Young Jun, Chang-Geun Ahn, Lim Ji Eun
- Application No.
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14475487 (2014.09.02)
- Publication No.
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20150061455 (2015.03.05)
- Registration No.
- 9650238 (2017.05.16)
- Country
- UNITED STATES
- Abstract
- A vibration device including a supporting portion formed to cover both ends of a vibration region, and a method of manufacturing the vibration device are provided. The vibration device may include a lower substrate on which an insulating layer is formed, an upper substrate connected onto the insulating layer, and including a vibration region that vibrates and that is separated from the lower substrate by at least a predetermined distance, and a supporting portion formed to cover both ends of the vibration region, to support the vibration region.
- KSP Keywords
- insulating layer
- Family
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