Registered
APPARATUS FOR GENERATING PLASMA
- Inventors
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Yu Han Young, Kim Yark Yeon, Jang Won Ick, Yoon Yong Sun, Bong Kuk Lee
- Application No.
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14631766 (2015.02.25)
- Publication No.
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20150245458 (2015.08.27)
- Registration No.
- 9627167 (2017.04.18)
- Country
- UNITED STATES
- Abstract
- Provided herein an apparatus for generating plasma, the apparatus including a nozzle array, first electrode, and housing. The nozzle discharges plasma. The first electrode is disposed to surround the nozzle array. The housing is disposed to surround the nozzle array and first electrode. The nozzle includes a plurality of nozzles disposed adjacent to one another and in the form of an array, each nozzle configured to discharge plasma. Therefore, it is possible to generate a large size plasma evenly and stably.
- Family
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