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Registered APPARATUS FOR GENERATING PLASMA

Inventors
Yu Han Young, Kim Yark Yeon, Jang Won Ick, Yoon Yong Sun, Bong Kuk Lee
Application No.
14631766 (2015.02.25)
Publication No.
20150245458 (2015.08.27)
Registration No.
9627167 (2017.04.18)
Country
UNITED STATES
Abstract
Provided herein an apparatus for generating plasma, the apparatus including a nozzle array, first electrode, and housing. The nozzle discharges plasma. The first electrode is disposed to surround the nozzle array. The housing is disposed to surround the nozzle array and first electrode. The nozzle includes a plurality of nozzles disposed adjacent to one another and in the form of an array, each nozzle configured to discharge plasma. Therefore, it is possible to generate a large size plasma evenly and stably.
KSP Keywords
Discharge plasma, large size
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Status Patent Country KIPRIS
Registered APPARATUS FOR GENERATING PLASMA KOREA KIPRIS