Registered
APPARATUS FOR MONITORING GAS AND PLASMA PROCESS EQUIPMENT INCLUDING THE SAME
- Inventors
-
Sun Jin Yun, Lim Jungwook, Lee Kyu Sung
- Application No.
- 14/621739 (2015.02.13)
- Registration No.
- 10153141 (2018.12.11)
- Country
- UNITED STATES
- Project Code
-
13MB2100, Development of a-Si/SiGe tandem structure thin film solar cells of conversion efficiency 13% on flexible metal substrate,
Sun Jin Yun
- KSP Keywords
- Plasma process, Process equipment
- Family
-