14IE1200, Developnent of Intensity-Controllable Micro-focus Multi X-ray Sources,
Yoon-Ho Song
Abstract
본 발명은 전계방출 소자에 관한 것이다. 이에 따른 본 발명은, 음극 전원에 연결되며, 전자를 방출하는 캐소드, 양극 전원에 연결되며, 상기 캐소드에서 방출된 전자를 수용하는 타겟 물질을 포함하는 아노드 및 상기 아노드와 대면하도록 형성되며, 상기 캐소드에서 방출된 전자가 통과하는 개구를 포함하는 접지 전극을 포함하되, 상기 접지 전극은 상기 아노드가 고전압에서 동작함으로써 방전이 발생하는 경우에, 상기 방전에 의한 전하가 접지 쪽으로 방출되도록 하기 위해 접지되는 것을 특징으로 하는 전계방출 소자에 관한 것이다.
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