고전압 안정성 전계방출 소자 및 구동방법
정진우, 송윤호, 김재우, 강준태
- 10438765 (2019.10.08)
14IE1200, 세기 조절 마이크로 포커스 멀티엑스선원 기술 개발,
- Provided herein is a field emission device. The field emission device includes a cathode which is connected to a negative power supply and emits electrons, an anode which is connected to a positive power supply and includes a target material receiving the electrons emitted from the cathode, and a ground electrode which is formed to face the anode and has an opening through which the electrons emitted from the cathode pass. The ground electrode is grounded so that when an arc discharge occurs due to high voltage operation of the anode, electric charge produced by the arc discharge is emitted to a ground.
- KSP 제안 키워드
- Electric charge, Ground electrode, High Voltage, High voltage operation, Target material, arc discharge, field emission, field emission device, power supply