Registered
SEMICONDUCTOR DEVICE
- Inventors
-
Jun Chi Hoon, Jeho Na, Jung Dong Yun, Hyung Seok Lee, Eun Soo Nam, Sang Choon Ko
- Application No.
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14872868 (2015.10.01)
- Publication No.
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20160260653 (2016.09.08)
- Registration No.
- 9613884 (2017.04.04)
- Country
- UNITED STATES
- Project Code
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14MB1200, Next Generation Optical and Electrical Module Technology for Smart Data Center,
Eun Soo Nam
- Abstract
- Provided is a semiconductor device. The semiconductor device includes a substrate including a cantilever configured to generate a flow of cooling media through dynamic movement, an active area on the substrate which an electronic device is provided on, an insulation layer disposed to be spaced apart from the active area on the substrate, a lower electrode on the insulation layer, a piezoelectric film on the lower electrode, and an upper electrode on the piezoelectric film.
- KSP Keywords
- Active area, Cooling media, Insulation layer, electronic devices, piezoelectric film, semiconductor device
- Family
-
패밀리 특허 목록
| Status |
Patent |
Country |
KIPRIS |
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Registered
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반도체 소자
|
KOREA |
KIPRIS
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