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Registered SEMICONDUCTOR DEVICE

Inventors
Jun Chi Hoon, Jeho Na, Jung Dong Yun, Hyung Seok Lee, Eun Soo Nam, Sang Choon Ko
Application No.
14872868 (2015.10.01)
Publication No.
20160260653 (2016.09.08)
Registration No.
9613884 (2017.04.04)
Country
UNITED STATES
Project Code
14MB1200, Next Generation Optical and Electrical Module Technology for Smart Data Center, Eun Soo Nam
Abstract
Provided is a semiconductor device. The semiconductor device includes a substrate including a cantilever configured to generate a flow of cooling media through dynamic movement, an active area on the substrate which an electronic device is provided on, an insulation layer disposed to be spaced apart from the active area on the substrate, a lower electrode on the insulation layer, a piezoelectric film on the lower electrode, and an upper electrode on the piezoelectric film.
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Status Patent Country KIPRIS
Registered Semiconductor device KOREA KIPRIS