등록
펨토초 고출력 레이저를 이용한 고해상도 전자빔 이미징용 고에너지 바늘형태의 전자빔 가속 방법
- 발명자
-
정문연, 송동훈, 김진선
- 출원번호
-
15059199 (2016.03.02)
- 공개번호
-
20160260575 (2016.09.08)
- 등록번호
- 9460888 (2016.10.04)
- 출원국
- 미국
- 협약과제
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14MC1200, 종양치료용 레이저 이온 가속 시스템 원천 기술 개발,
정문연
- 초록
- Provided may include an electron beam generator, an image apparatus including the same, and an optical apparatus. The optical apparatus includes a first and second laser apparatuses providing a first and second laser beams on a substrate, and a first optical system provided between the first and second laser apparatuses and the substrate to focus the first and second laser beams. The first and second laser beams overlap with each other generating an interference beam, thereby decreasing a spot size of the interference beam to be smaller than a wavelength of each of the first and second laser beams at a focal point.
- KSP 제안 키워드
- Electron Beam, Electron beam generator, Focal point, Laser beams, Optical apparatus, Spot size, optical system
- 패밀리
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