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Registered ELECTRON BEAM GENERATOR, IMAGE APPARATUS INCLUDING THE SAME AND OPTICAL APPARATUS

펨토초 고출력 레이저를 이용한 고해상도 전자빔 이미징용 고에너지 바늘형태의 전자빔 가속 방법
이미지 확대
Inventors
Jung Moon Youn, Song Dong Hoon, Kim Jin Sun
Application No.
15059199 (2016.03.02)
Publication No.
20160260575 (2016.09.08)
Registration No.
9460888 (2016.10.04)
Country
UNITED STATES
Project Code
14MC1200, Core Technology Development of Laser Accelerated Ion-Beam Generation System for Cancer Therapy, Jung Moon Youn
Abstract
Provided may include an electron beam generator, an image apparatus including the same, and an optical apparatus. The optical apparatus includes a first and second laser apparatuses providing a first and second laser beams on a substrate, and a first optical system provided between the first and second laser apparatuses and the substrate to focus the first and second laser beams. The first and second laser beams overlap with each other generating an interference beam, thereby decreasing a spot size of the interference beam to be smaller than a wavelength of each of the first and second laser beams at a focal point.
KSP Keywords
Electron Beam, Electron beam generator, Focal point, Laser beams, Optical apparatus, Spot size, optical system
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Status Patent Country KIPRIS
Registered electron beam generator, image apparatus including the same and optical apparatus KOREA KIPRIS