절연성 기판, 상기 절연성 기판 상의 반도체층, 상기 반도체층 상에 배치되고, 상기 절연성 기판의 일면과 평행한 제 1 방향으로 상호 이격되는 절연층들, 상기 절연층들 상에 배치되는 금속 박막들, 및 상기 반도체층과 상기 제 2 부분들 사이의 금속-반도체 화합물층들을 포함하는 열전 소자를 제공하되, 상기 금속 박막들의 각각은 상기 절연층과 오버랩되는 제 1 부분, 및 상기 제 1 부분으로부터 상기 제 1 방향 또는 상기 제 1 방향의 반대 방향으로 연장되어 상기 반도체층과 연결되는 제 2 부분들을 포함하고, 서로 인접한 상기 금속 박막들의 마주하는 상기 제 2 부분들은 서로 이격될 수 있다.
KSP Keywords
Thermoelectric Module(TEM), Thermoelectric element
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