상세정보
등록 초저저항 투명전극 제조장치
- 발명자
- 정우석
- 출원번호
- 15695934 (2017.09.05)
- 공개번호
- 20180087174 (2018.03.29)
- 등록번호
- 10822712 (2020.11.03)
- 출원국
- 미국
- 초록
- An electroplating apparatus includes a substrate, a seed layer provided on a top surface of the substrate, a high-voltage portion provided on a bottom surface of the substrate, a housing sealing the high-voltage portion, an anode structure spaced apart from the seed layer in a direction perpendicular to the top surface of the substrate, first power source generating a first voltage difference between the seed layer and the anode structure, and a second power source applying a second voltage to the high-voltage portion. A positive terminal of the first power source is electrically connected to the anode structure, and a negative terminal of the first power source is electrically connected to the seed layer.
- KSP 제안 키워드
- Anode structure, Bottom surface, High Voltage, Seed layer, The seed layer, Voltage difference, power source
- 패밀리
| 구분 | 특허 | 출원국 | KIPRIS |
|---|---|---|---|
| 등록 | 전기 도금 장치 | 대한민국 | KIPRIS |