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Registered FIELD EMISSION APPARATUS

고투과 집속 전자빔 전계방출 구조 및 이를 구비한 디지털 엑스선 튜브
이미지 확대
Inventors
Choi Young Chul, Yoon-Ho Song, Jeon Hyo Jin, Kang Jun Tae, Park Sora, Kim Jae-Woo, Eun Sol Ko, 이정웅, Yeon Ji-Hwan, 정진우, Shin Min Sik, Sung-Hee Kim
Application No.
15835073 (2017.12.07)
Publication No.
20180158640 (2018.06.07)
Registration No.
10438764 (2019.10.08)
Country
UNITED STATES
Project Code
16ZB1900, The study on the technology of nano electron-source, Yoon-Ho Song
Abstract
Disclosed is a field emission apparatus. The apparatus comprises a cathode electrode and an anode electrode spaced apart from each other, an emitter on the cathode electrode, a gate electrode between the cathode and anode electrodes and including at least one gate aperture overlapping the emitter, and an electron transmissive sheet on the gate electrode and including a plurality of fine openings overlapping the gate aperture.
KSP Keywords
Cathode electrode, Field Emission, anode electrode, cathode and anode, gate aperture, gate electrode