진공 밀봉튜브 기반 자기렌즈 집속 엑스선원
정진우, 송윤호, 강준태, 김재우
- 10559446 (2020.02.11)
- Provided is an X-ray source including a vacuum closed tube. The X-ray source includes a high voltage connection module, a tube module, and a magnetic lens system into which the tube module is inserted. The tube module includes a vacuum closed tube. The vacuum closed tube includes a cathode electrode provided at one end thereof, a nano-emitter on the cathode electrode, an anode electrode provided at the other end, and a first insulation spacer provided between the cathode electrode and the anode electrode. In addition, the vacuum closed tube includes a first conductive tube and a second conductive tube both provided between the cathode electrode and the anode electrode and separated from each other by the first insulation spacer, and a first collimator block covering an inner surface of the first insulation spacer and having a first opening.
- KSP 제안 키워드
- Cathode electrode, Closed tube, High Voltage, Inner surface, Magnetic lens, Magnetic lens system, Nano-emitter, X-ray sources, anode electrode, x-ray