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Registered METHOD FOR FABRICATING METAL CHALCOGENIDE THIN FILMS

칼코겐화합물 초박막 제조 방법
이미지 확대
Inventors
Sun Jin Yun, Jung Kwang Hoon, Lim Jungwook, 채현준
Application No.
16047871 (2018.07.27)
Publication No.
20190067005 (2019.02.28)
Registration No.
10811254 (2020.10.20)
Country
UNITED STATES
Project Code
17HB1300, Fundamental technologies of two-dimensional materials and devices for the platform of new-functional smart devices, Sun Jin Yun
Abstract
Provided is a method for fabricating high-uniformity and high-quality metal chalcogenide thin films. The method for fabricating metal chalcogenide thin films may include forming a metal precursor thin film including a metal thin film and a chalcogen thin film disposed on the upper surface or lower surface of the metal thin film; and performing a chalcogenization process for providing a chalcogen source on the metal precursor thin film to form a first metal chalcogenide thin film.
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Status Patent Country KIPRIS
Registered Method for fabricating metal chalcogenide thin films KOREA KIPRIS