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Detail
Registered METHOD FOR FABRICATING METAL CHALCOGENIDE THIN FILMS
- Inventors
- Sun Jin Yun, Jung Kwang Hoon, Lim Jungwook, 채현준
- Application No.
- 16047871 (2018.07.27)
- Publication No.
- 20190067005 (2019.02.28)
- Registration No.
- 10811254 (2020.10.20)
- Country
- UNITED STATES
- Project Code
- 17HB1300, Fundamental technologies of two-dimensional materials and devices for the platform of new-functional smart devices, Sun Jin Yun
- Abstract
- Provided is a method for fabricating high-uniformity and high-quality metal chalcogenide thin films. The method for fabricating metal chalcogenide thin films may include forming a metal precursor thin film including a metal thin film and a chalcogen thin film disposed on the upper surface or lower surface of the metal thin film; and performing a chalcogenization process for providing a chalcogen source on the metal precursor thin film to form a first metal chalcogenide thin film.
- Family
| Status | Patent | Country | KIPRIS |
|---|---|---|---|
| Registered | 금속 칼코겐 화합물 박막의 제조 방법 | KOREA | KIPRIS |