3차원 집적회로에 응용을 위한 층간 광결합기
박재규, 김경옥, 주지호
- 10859765 (2020.12.08)
- Provided are an optical coupling device and a method for manufacturing the same. The optical coupling device includes a first waveguide including a first forward tapered part, a second waveguide disposed on the first waveguide and including a first reverse tapered part in a direction opposite to the first forward tapered part, and an interlayer waveguide disposed between the first and second waveguides and having a thickness corresponding to a distance between the first forward tapered part and the first reverse tapered part.
- KSP 제안 키워드
- Optical coupling, Tapered part, coupling device