플라즈모닉 커플러를 이용한 도파로 집적형 고효율 단일광자 검출기
이욱재, 주정진, 김민수, 이종무
- 10551244 (2020.02.04)
17HB1800, 양자 광집적회로 원천기술 연구,
- Provided is a photon detector. The photon detector includes an optical waveguide including input and detection regions, which are spaced apart from each other in a first direction, and a conversion region between the input region and the detection region, a nano pattern disposed on the optical waveguide in the conversion region, and a nanowire disposed on the optical waveguide in the detection region. The nano pattern includes a first pattern and a second pattern, which extend in the first direction, and the first pattern and the second pattern are spaced apart from each other in a second direction crossing the first direction.