17HB3800, Multi-functional environment sensor module development for air quality monitoring compatible with a smartphone,
Jaewoo Lee
Abstract
기판, 상기 기판 상에 상기 기판과 이격되어 배치되는 지지막, 상기 지지막 상에서 상기 기판의 상면과 평행한 방향으로 상호 이격되는 제 1 열전 소자 및 제 2 열전 소자, 상기 지지막 상에서 상기 제 1 열전 소자의 일단과 제 2 열전 소자의 일단을 연결하는 연결 전극, 및 상기 제 1 및 제 2 열전 소자들 상에 배치되는 적외선 필터를 포함하는 적외선 센서를 제공하되, 상기 제 1 및 제 2 열전 소자들은 서로 다른 도전형의 반도체 물질을 포함하고, 상기 적외선 필터는 상기 적외선 필터로 입사되는 적외선 대역의 전자기파의 파장보다 작은 간격을 갖고 주기적으로 형성된 금속 패턴들을 포함할 수 있다.
KSP Keywords
Infrared sensor
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