얇은 흡수층을 가지는 고효율의 고속 도파로형 광검출기 제조 방법
- 11500150 (2022.11.15)
19HB2500, 파장당 400G 이상의 차세대 광전달망 소자·부품 개발,
18PB5400, IoT 응용을 위한 레이/웨이브 하이브리드 광학 기반 고효율 시뮬레이션 플랫폼 개발,
- Provided is a waveguide photodetector including a semiconductor substrate, a first optical waveguide and a second optical waveguide, which are sequentially laminated on the semiconductor substrate, in which each of the first optical waveguide and the second optical waveguide includes a first portion and a second portion, and the first portion extends from the second portion in a first direction parallel to a top surface of the semiconductor substrate, a refractive index matching layer disposed on the second portion of the second optical waveguide, a clad layer disposed on the refractive index matching layer, and an absorber disposed between the refractive index matching layer and the clad layer. Here, the second optical waveguide has a first conductive-type, the clad layer has a second conductive-type opposite to the first conductive-type, and the refractive index matching layer includes a first semiconductor layer that is an intrinsic semiconductor layer.
- KSP 제안 키워드
- Clad layer, Optical waveguides, Refractive index matching, Waveguide photodetector, index matching, matching layer, refractive index, semiconductor substrate