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Registered MEMS 가스 센서 및 그의 제조 방법

Inventors
문승언, 김정훈, 임종필
Application No.
2023-0006006 (2023.01.16)
Publication No.
10-2024-0045057 (2024.04.05)
Registration No.
2913994 (2026.01.13)
Country
KOREA
Project Code
22JB1100, Development of ultar-compact, low-power MEMS exhalation sensor platform based on CMOS process, Moon Seungeon
Family
 
패밀리 특허 목록
Status Patent Country KIPRIS
Registered MEMS GAS SENSOR AND MANUFACTURING METHOD THEREOF UNITED STATES