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학술지
2021 Effects and Mechanism of SurfaceWaterWettability and Operating Frequency on Response Linearity of Flexible IDE Capacitive Humidity Sensor   양우석   Sensors, v.21 no.19, pp.1-13 0 원문
학술대회
2020 High SNR and Wide Dynamic Range Digital MEMS Microphone ROIC   김이경   한국 반도체 학술 대회 (KCS) 2020, pp.863-863
학술대회
2017 MEMS Capacitive Microphone with Dual-Anchored Membrane   제창한   Eurosensors 2017, pp.1-5 원문
학술대회
2017 디지털 MEMS 마이크로폰 ROIC용 더블 샘플링 시그마-델타 변조기   김이경   대한전자공학회 학술 대회 (하계) 2017, pp.325-327
학술대회
2016 High Sensitivity Surface Micromachined Absolute Pressure Sensor   제창한   Eurosensors 2016, pp.1-4 12 원문
학술지
2016 Surface Micromachined Pressure Sensor with Internal Substrate Vacuum Cavity   제창한   ETRI Journal, v.38 no.4, pp.685-694 2 원문
학술지
2016 Low-Noise MEMS Microphone Readout Integrated Circuit Using Positive Feedback Signal Amplification   김이경   ETRI Journal, v.38 no.2, pp.235-243 5 원문
학술지
2016 TiN/PECVD-Si3N4/TiN Diaphragm-based Capacitive-type MEMS Acoustic Sensor   이재우   Electronics Letters, v.52 no.6, pp.468-470 4 원문
학술지
2015 The Effects of Electrodes Patterned onto the Piezoelectric Thin Film on Frequency Response Characteristics of PMN-PT MEMS Acoustic Actuators   김혜진   Journal of Electroceramics, v.35 no.1, pp.45-52 5 원문
학술지
2015 A Concave-Patterned TiN/PECVD-Si3N4 /TiN Diaphragm MEMS Acoustic Sensor Based on a Polyimide Sacrificial Layer   이재우   Journal of Micromechanics and Microengineering, v.25 no.12, pp.1-13 6 원문
학술지
2015 MEMS 압력 센서의 기술 및 산업 동향   제창한   전자통신동향분석, v.30 no.6, pp.21-30 원문
학술대회
2015 Open-Circuit Sensitivity Model based on Empirical Parameters for a Capacitive-type MEMS Acoustic Sensor   이재우   International Conference on Materials and Applications for Sensors and Transducers (IC-MAST) 2015, pp.1-10 1 원문
학술대회
2015 MEMS Piezoresistive Pressure Sensor with Substrate Inner Cavity   제창한   COMS Conference 2015, pp.1-2
학술지
2015 Fabrication of Nano Scale Electrode for Sensor Using Nanoimprint Lithography   최낙진   Journal of Nanoelectronics and Optoelectronics, v.10 no.4, pp.480-484 2 원문
학술대회
2015 감지 박막 중앙 배기 구멍에 따른 표면 가공형 멤스 음향 센서의 특성 분석   제창한   마이크로나노시스템학회 한국 MEMS 학술 대회 2015, pp.293-294
학술대회
2015 이중 희생층이 적용된 콘덴서형 멤스 음향 센서   이재우   마이크로나노시스템학회 한국 MEMS 학술 대회 2015, pp.139-140
학술대회
2015 A Capacitive-Type MEMS Acoustic Sensor with a Diaphragm of Al/Si3N4/Al Based on a Polyimide Sacrificial Layer   이재우   International Conference on Electronics, Information and Communication (ICEIC) 2015, pp.228-229
학술지
2015 Durability Improvement of Solid Electrolyte CO2 Sensor Against Humidity Variations   이형근   Journal of Nanoscience and Nanotechnology, v.15 no.1, pp.404-407 7 원문
학술지
2014 Bottom-Inlet-Type Micro-Electro-Mechanical System Acoustic Sensors Based on Two Polyimide/Amorphous-Si Sacrificial Layers   이재우   IET Micro & Nano Letters, v.9 no.12, pp.845-849 0 원문
학술대회
2014 The Effect of Back-Chamber Volume on the Surface Micromachined Acoustic Sensor   제창한   SENSORS 2014, pp.1-4 2 원문
학술지
2014 The Vibrational Characteristics of the Triple-Layered Multimorph Ceramics for High Performance Piezoelectric Acoustic Actuators   김혜진   Journal of Electroceramics, v.33 no.1-2, pp.53-63 2 원문
학술지
2014 Surface Properties of ZrO2 Thin Film Under Cl2/Ar Plasma Using Angle-Resolved X-Ray Photoelectron Spectroscopy   우종창   Japanese Journal of Applied Physics, v.53 no.8S3, pp.1-6 1 원문
학술지
2014 Ultrafast Response Sensor to Formaldehyde Gas Based on Metal Oxide   최낙진   Journal of Nanoscience and Nanotechnology, v.14 no.8, pp.5807-5810 13 원문
학술대회
2014 The Effects of Electrodes Patterned onto the Membrane on Frequency Response Characteristics of PMN-PT Piezoelectric MEMS Acoustic Actuators   김혜진   Electroceramics Conference 2014, pp.1-1
학술지
2014 Reduction Algorithm for Gas Measurement Time in Wireless Sensor Network Applications with Limited Power   최낙진   Sensor Letters, v.12 no.6-7, pp.1093-1095 0 원문
학술대회
2014 Bottom-inlet-type MEMS Acoustic Sensors based on Two Polyimide/A-Si Sacrificial Layers   이재우   Asia-Pacific Conference on Transducers and Micro/Nano Technologies (APCOT) 2014, pp.1-2
학술대회
2014 백플레이트 지지대를 갖는 고감도 표면 가공형 멤스 마이크로폰   제창한   마이크로나노시스템학회 한국 MEMS 학술 대회 2014, pp.1-2
학술대회
2014 바퀴 모양 하부 전극 지지대를 갖는 밑면 주입 멤스 마이크로폰   이재우   마이크로나노시스템학회 한국 MEMS 학술 대회 2014, pp.1-2
학술대회
2013 A Surface Micromachined MEMS Capacitive Microphone with Back-Plate Supporting Pillars   제창한   SENSORS 2013, pp.1-4 5 원문
학술지
2013 Stacked-Type Potentiometric Solid-State CO2 Gas Sensor   최낙진   Sensors and Actuators B : Chemical, v.187, pp.340-346 18 원문
학술지
2013 Low Power Consumption Micro C2H5OH Gas Sensor Based on Micro-Heater and Screen Printing Technique   문승언   Sensors and Actuators B : Chemical, v.187, pp.598-603 19 원문
학술지
2013 Semiconductor-Type MEMS Gas Sensor for Real-Time Environmental Monitoring Applications   문승언   ETRI Journal, v.35 no.4, pp.617-624 38 원문
학술지
2013 Effects of an Elastic Mass on Frequency Response Characteristics of an Ultra-Thin Piezoelectric Micro-Acoustic Actuator   김혜진   IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control, v.60 no.8, pp.1587-1594 7 원문
학술대회
2013 The Reduction Algorithm of Gas Measurement Time for Wireless Sensor Network Applications with Limited Power   최낙진   International Symposium on Olfaction and Electronic Nose (ISOEN) 2013, pp.1-2
학술대회
2013 Effect of Asymmetric Piezoelectric Multimorph Ceramic on Frequency Response Characteristics of Piezoelectric Acoustic Actuator   김혜진   International Symposium on the Applications of Ferroelectric (ISAF) 2013 / Workshop on the Piezoresponse Force Microscopy (PFM) 2013, pp.332-335 1 원문
학술대회
2013 A Bottom-Inlet type MEMS Acoustic Sensor with Wheel-Shaped Back-Plate Anchor   이재우   EUROCON 2013, pp.2116-2122 0 원문
학술지
2013 BCl3/Ar 유도 결합 플라즈마 안에 CH4 가스 첨가에 따른 건식 식각된 TaN 박막 표면의 연구   우종창   전기전자재료학회논문지, v.26 no.5, pp.335-340 원문
학술대회
2013 MEMS CO2 센서를 위한 고체전해질 개발   이형근   한국 MEMS 학술대회, pp.437-438
학술대회
2013 저소모 전력 특성의 전기 화학식 마이크로 이산화탄소 가스 센서   문승언   한국 MEMS 학술 대회 2013, pp.305-306
학술지
2012 Fast Response Formaldehyde Gas Sensor for USN Application   최낙진   Sensors and Actuators B : Chemical, v.175, pp.132-136 21 원문
학술대회
2012 Structure-Based Equivalent Circuit Modeling of a Capacitive-Type MEMS Microphone   이재우   International Symposium on Communications and Information Technologies (ISCIT) 2012, pp.228-233 1 원문
학술지
2012 Encapsulation of Semiconductor Gas Sensors with Gas Barrier Films for USN Application   이형근   ETRI Journal, v.34 no.5, pp.713-718 17 원문
학술지
2012 A Solid Electrolyte Potentiometric CO2 Gas Sensor Composed of Lithium Phosphate as both the Reference and the Solid Electrolyte Material   이형근   한국물리학회, v.61 no.6, pp.938-941 11 원문
학술지
2012 무선 전력 전송을 위한 초음파 트랜스듀서 시스템 개발 Part 1: 송신 소자 개발   염우섭   한국소음진동공학회논문집, v.22 no.9, pp.845-852 원문
학술지
2012 Improvement of Low-Frequency Characteristics of Piezoelectric Speakers Based on Acoustic Diaphragms   김혜진   IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control, v.59 no.9, pp.2027-2035 18 원문
학술지
2012 Low-Power-Consumption Metal Oxide NO2 Gas Sensor based on Micro-Heater and Screen Printing Technology   문승언   Journal of Nanoscience and Nanotechnology, v.12 no.7, pp.5543-5546 7 원문
학술대회
2012 Development of Ultrasonic Wireless Power Transfer System   황건   International Congress and Exposition on Noise Control Engineering (Inter-Noise) 2012, pp.1-11
학술지
2012 Thin MEMS Microphone Based on a Package-Integrated Fabrication Process   이재우   Electronics Letters, v.48 no.14, pp.866-867 5 원문
학술대회
2012 Improvement on Frequency Response Characteristics of the Ultra-thin Piezoelectric Acoustic Actuators   김혜진   International Symposium on Applications of Ferroelectrics (ISAF) 2012 / European Conference on the Applications of Polar Dielectrics (ECAPD) 2012 / International Symposium on Piezoresponse Force Microscopy and Nanoscale Phenomena in Polar Materials (PFM), pp.1-4 3 원문
학술대회
2012 Fire Detection Technique based on Audible Sound Field   박강호   Internaltional Congress on Sound and Vibration (ICSV) 2012, pp.1-8
학술대회
2012 Response/Recovery Behaviors of Solid Electrolyte CO2 Gas Sensors Depending on Reference Materials   이형근   International Meeting on Chemical Sensors (IMCS) 2012, pp.493-496 원문
학술대회
2012 Stacked Type Potentiometric Solid-State CO2 Gas Sensor for Miniaturization   최낙진   International Meeting on Chemical Sensors (IMCS) 2012, pp.507-510
학술지
2012 Characterization of High Power Piezoelectric Energy Scavenging Device based on PMN-PT Piezoelectric Single Crystal   문승언   한국물리학회, v.60 no.2, pp.230-234 2 원문
학술지
2012 High-Response and Low-Power-Consumption CO Micro Gas Sensor Based on Nano-Powders and a Micro-Heater   문승언   한국물리학회, v.60 no.2, pp.235-239 5 원문
학술지
2012 Fabrication of HCHO Gas Sensor Based on MEMS Heater and Inkjet Printing   이형근   한국물리학회, v.60 no.2, pp.225-229 8 원문
학술대회
2011 A Surface-Micromachined MEMS Acoustic Sensor with Back-Plate Anchors of 100 μm Depth   이재우   SENSORS 2011, pp.1-4 6 원문
학술대회
2011 Fast Response Formaldehyde Gas Sensor for USN Application   최낙진   Eurosensors 2011, pp.1073-1076 2 원문
학술대회
2011 The Novel Sensitivity Improved Surface Micromachined MEMS Microphone with the Center-Hole Membrane   제창한   Eurosensors 2011, pp.583-586 7 원문
학술대회
2011 Efficient Reducing Method of Graphene Oxide for Gas Sensor Applications   이형근   Eurosensors 2011, pp.892-895 11 원문
학술대회
2011 Intrusion Detection based on the Sound Field Variation of Audible Frequency   이성규   International Congress on Sound and Vibration (ICSV) 2011, pp.1-8
학술대회
2011 Low-frequency Reinforced Ferroelectric Acoustic Actuators   김혜진   International Symposium on Applications of Ferroelectrics (ISAF) / International Symposium on Piezoresponse Force Microscopy and Nanoscale Phenomena in Polar Materials (PFM) 2011, pp.1-4 0 원문
학술대회
2011 Ultrafast Response Sensor to Formaldehyde Gas Based on Metal Oxide   최낙진   International Conference on Molecular Electronics and Devices (IC ME&D) 2011, pp.1-2
학술지
2011 가청 주파수대 음장 변화 측정 기반 침입 감지 기술   이성규   한국소음진동공학회논문집, v.21 no.3, pp.212-219 원문
학술대회
2010 Z-axis Capacitive MEMS Accelerometer with Moving Ground Masses   제창한   SENSORS 2010, pp.635-638 2 원문
학술대회
2010 A Surface-Micromachined MEMS Acoustic Sensor with 0.8 um CMOS Impedance Transducer   이재우   SENSORS 2010, pp.1779-1782 4 원문
학술지
2010 초소형 음향 소자의 기술 및 산업 동향   양우석   전자통신동향분석, v.25 no.5, pp.1-10 원문
학술지
2010 Effect of High Temperature Post-Annealing of La0.7Sr0.3MnO3 Films Deposited by Radio Frequency Magnetron Sputtering on SiO2/Si Substrates Heated at Low Temperature   최선규   Thin Solid Films, v.518 no.15, pp.4432-4436 3 원문
학술지
2009 Evaluation of 1/f Noise Characteristics for Si-Based Infrared Detection Materials   류호준   ETRI Journal, v.31 no.6, pp.703-708 3 원문
학술지
2009 스마트 빌딩용 센서 기술 현황 및 전망   박강호   전자통신동향분석, v.24 no.6, pp.1-10 원문
학술지
2009 Low Temperature Grown Polycrystalline La0.7Sr0.3MnO3 thin Films on Amorphous SiO2 Substrates by Rf Magnetron Sputtering   최선규   Journal of Vacuum Science and Technology A, v.27 no.4, pp.595-600 3 원문
학술지
2009 적외선 마이크로 볼로미터를 위한 Si1-xSbx 박막의 특성   이동근   반도체 및 디스플레이장비학회지, v.8 no.3, pp.13-17
학술지
2009 비정질 실리콘 기반의 비냉각형 16×16 적외선 초점면 배열의 개발   전상훈   센서학회지, v.18 no.4, pp.301-306 원문
학술대회
2008 Sputtered Silicon Antimony Thin Film for The Infrared Detection Layer of Microbolometer   류호준   SENSORS 2008, pp.301-304 0 원문
학술지
2008 Stress Reduction of Ge2Sb2Te5 by Inhibiting Oxygen Diffusion   박영삼   Materials Transactions, v.49 no.9, pp.2107-2111 1 원문
학술대회
2008 1/f Noise Characteristics of Sputtered Silicon Antimony Thin Film for Microbolometer   류호준   Eurosensors 2008, pp.877-880
학술대회
2008 Deformation Reduction of a MEMS Sensor by Stress Balancing of Multilayer   양우석   International Conference on Sensor Technologies and Applications (SENSORCOMM) 2008, pp.391-395 4 원문
학술지
2008 A Micromachined Infrared Senor for an Infrared Focal Plane Array   조성목   Sensors and Transducers, v.90, pp.302-309
학술대회
2007 Novel Process for the Electrodes of Microbolometer   류호준   International Conference on Sensor Technologies and Applications (SENSORCOMM) 2007, pp.10-13 1 원문
학술대회
2007 Stress Reduction of Ge2Sb2Te5 Crystallization by Capping Al2O3 Film Grown by PEALD   박영삼   The Electrochemical Society (ECS) Meeting 2007 (212th), pp.1-1
학술지
2007 Stress Reduction of Ge2Sb2Te5 Crystallization by Capping Al2O3 Film Grown by PEALD   박영삼   ECS Transactions, v.11 no.7, pp.245-248 2 원문
학술지
2007 Infrared Focal Plane Array 용 MEMS 구조체 개발   조성목   전기학회논문지, v.56 no.8, pp.1461-1465
학술지
2006 Comparative study on Chemical Stability of Dielectric Oxide Films under HF Wet and Vapor Etching for Radiofrequency Microelectromechanical System Application   양우석   Thin Solid Films, v.500 no.1-2, pp.231-236 17 원문
학술대회
2004 A π Small-Signal Model of MEMS Series Switches Based on the Parameter- Extraction Method   이재우   International Conference on MEMS, NANO and Smart Systems (ICMENS) 2004, pp.502-508 원문