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Conference Paper GaN 기반 MIM 커패시터의 수율 및 균일도 분석
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Authors
Lee Sang-Heung, Kim Seong-Il, Youn Sub Noh, Hae Cheon Kim, Kang Soo Cheol, Sungjae Chang, Jung Hyunwook, Choi Ilgyu, Hokyun Ahn, Jong-Won Lim
Issue Date
202102
Source
한국전자파학회 종합 학술 대회 (동계) 2021, pp.153-153
Project Code
20VU1100, Development of self-reliance platform in defense advanced semiconductor materials and components for weapon system, Jong-Won Lim