Subject

Subjects : Low pressure chemical vapor deposition (LPCVD)

  • Articles (4)
  • Patents (0)
  • R&D Reports (0)
논문 검색결과
Type Year Title Cited Download
Conference 2012 Membrane Sieve Using Stoichiometric and Stress-Reduced SiN/SiO/SiN Multilayer Films and Applications to Plasma Separation   Dae-Sik Lee  SENSORS 2012, pp.1-4 2 원문
Journal 2012 Construction of Membrane Sieves Using Stoichiometric and Stress-Reduced Si3N4/SiO2/Si3N4 Multilayer Films and Their Applications in Blood Plasma Separation   Dae-Sik Lee  ETRI Journal, v.34, no.2, pp.226-234 15 원문
Journal 2011 Characteristics of Schottky Barrier Silicon Nanocluster Floating Gate Flash Memory   손대호  Thin Solid Films, v.519, no.18, pp.6174-6177 0 원문
Journal 2003 Optimization of Selective Epitaxial Growth of Silicon in LPCVD   Cheong Woo-Seok  ETRI Journal, v.25, no.6, pp.503-509 8 원문
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연구보고서 검색결과
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