Subjects :
Low pressure chemical vapor deposition (LPCVD)
논문 검색결과
| Type |
Year |
Title |
Cited |
Download |
|
Conference
|
2012 |
Membrane Sieve Using Stoichiometric and Stress-Reduced SiN/SiO/SiN Multilayer Films and Applications to Plasma Separation
Dae-Sik Lee SENSORS 2012, pp.1-4 |
2 |
원문
|
|
Journal
|
2012 |
Construction of Membrane Sieves Using Stoichiometric and Stress-Reduced Si3N4/SiO2/Si3N4 Multilayer Films and Their Applications in Blood Plasma Separation
Dae-Sik Lee ETRI Journal, v.34, no.2, pp.226-234 |
15 |
원문
|
|
Journal
|
2011 |
Characteristics of Schottky Barrier Silicon Nanocluster Floating Gate Flash Memory
손대호 Thin Solid Films, v.519, no.18, pp.6174-6177 |
0 |
원문
|
|
Journal
|
2003 |
Optimization of Selective Epitaxial Growth of Silicon in LPCVD
Cheong Woo-Seok ETRI Journal, v.25, no.6, pp.503-509 |
8 |
원문
|
특허 검색결과
| Status |
Year |
Patent Name |
Country |
Family Pat. |
KIPRIS |
|
No search results. |
연구보고서 검색결과
| Type |
Year |
Research Project |
Primary Investigator |
Download |
|
No search results. |