Subjects : Surface micromachined MEMS
| Type | Year | Title | Cited | Download |
|---|---|---|---|---|
| Conference | 2014 | The Effect of Back-Chamber Volume on the Surface Micromachined Acoustic Sensor Chang Han Je SENSORS 2014, pp.1-4 | 2 | 원문 |
| Conference | 2013 | A Surface Micromachined MEMS Capacitive Microphone with Back-Plate Supporting Pillars Chang Han Je SENSORS 2013, pp.1-4 | 6 | 원문 |
| Conference | 2011 | The Novel Sensitivity Improved Surface Micromachined MEMS Microphone with the Center-Hole Membrane Chang Han Je Eurosensors 2011, pp.583-586 | 7 | 원문 |
| Conference | 2006 | Surface Micromachined MEMS Devices by Novel Dry Release Process Jang Won Ick 한국반도체 학술 대회 (KCS) 2006, pp.1-2 |
| Status | Year | Patent Name | Country | Family Pat. | KIPRIS |
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| Type | Year | Research Project | Primary Investigator | Download |
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