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Journal
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2011 |
Etching characteristics and mechanism of Ga-doped ZnO thin films in inductively-coupled HBr/X (X = Ar, He, N2, O2) plasmas
함용현 Vacuum, v.85, no.11, pp.1021-1025 |
10 |
원문
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Journal
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2010 |
Surface Characteristics of Parylene-C Films in an Inductively Coupled O2/CF4 Gas Plasma
Ham Yong-Hyun Thin Solid Films, v.518, no.22, pp.6378-6381 |
17 |
원문
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Conference
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2009 |
Study on the Surface Characteristics of Parylene-C Films in Inductively Coupled O2/CF4 Gas Plasma
Ham Yong-Hyun International Meeting on Information Display (IMID) 2009, pp.1399-1401 |
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