Subjects : Inductively coupled plasma reactor
| Type | Year | Title | Cited | Download |
|---|---|---|---|---|
| Journal | 2015 | Low Temperature Fabrication of Indium-Tin Oxide Film by Using Ionized Physical Vapor Deposition Method Cheong Woo-Seok Surface and Coatings Technology, v.266, pp.10-13 | 8 | 원문 |
| Journal | 2008 | Model-Based Analysis of Plasma Parameters and Active Species Kinetics in Cl2/X (X=Ar, He, N2) Inductively Coupled Plasmas Alexander Efremov Journal of the Electrochemical Society, v.155, no.12, pp.D777-D782 | 72 | 원문 |
| Status | Year | Patent Name | Country | Family Pat. | KIPRIS |
|---|---|---|---|---|---|
| No search results. | |||||
| Type | Year | Research Project | Primary Investigator | Download |
|---|---|---|---|---|
| No search results. | ||||