Subject

Subjects : Hard mask

  • Articles (4)
  • Patents (0)
  • R&D Reports (0)
논문 검색결과
Type Year Title Cited Download
Journal 2014 Random Nano-Structures as Light Extraction Functionals for Organic Light-Emitting Diode Applications   Shin Jin Wook  Organic Electronics, v.15, no.1, pp.196-202 93 원문
Journal 2008 Fabrication and Electrical Characterization of Phase-change Memory Devices with Nanoscale Self-heating-channel Structures   Yoon Sung Min  Microelectronic Engineering, v.85, no.12, pp.2334-2337 12 원문
Journal 2006 Dry Etching of Ge2Sb2Te5 Thin Films into Nanosized Patterns Using TiN Hard Mask   Yoon Sung Min  Japanese Journal of Applied Physics, v.45, no.40, pp.1080-1083 21 원문
Journal 2006 Formation of a Self-Aligned Hard Mask using Hydrogen Silsesquioxane   Kiju Im  Applied Physics Letters, v.88, no.15, pp.1-3 3 원문
특허 검색결과
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연구보고서 검색결과
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