Subjects : Reactive RF magnetron sputter
| Type | Year | Title | Cited | Download |
|---|---|---|---|---|
| Conference | 2012 | The Properties of SiOC Thin Film via Reactive RF Magnetron Sputter Method Kim Kyung Hyun International Materials Research Congress (IMRC) 2012 | ||
| Journal | 2009 | Vanadium Dioxide and Vanadium Sesquioxide Thin Films Fabricated on (0001) or (10 10)Al2O3 by Reactive RF-Magnetron Sputter Deposition and Subsequent Annealing Processes Sun Jin Yun Japanese Journal of Applied Physics, v.48, no.4, pp.1-4 | 9 | 원문 |
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| Type | Year | Research Project | Primary Investigator | Download |
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