Subject

Subjects : microelectro-mechanical

  • Articles (2)
  • Patents (0)
  • R&D Reports (0)
논문 검색결과
Type Year Title Cited Download
Conference 2011 A Surface-Micromachined MEMS Acoustic Sensor with Back-Plate Anchors of 100 μm Depth   Jaewoo Lee  SENSORS 2011, pp.1-4 6 원문
Conference 2009 A Surface-Micromachined MEMS Acoustic Sensor with X-Shape Bottom Electrode Anchor   Jaewoo Lee  SENSORS 2009, pp.1313-1316 12 원문
특허 검색결과
Status Year Patent Name Country Family Pat. KIPRIS
No search results.
연구보고서 검색결과
Type Year Research Project Primary Investigator Download
No search results.