Subject

Subjects : Integrated process

  • Articles (3)
  • Patents (0)
  • R&D Reports (0)
논문 검색결과
Type Year Title Cited Download
Journal 2012 Thin MEMS microphone based on package-integrated fabrication process   Jaewoo Lee  Electronics Letters, v.48, no.14, pp.866-867 5 원문
Conference 2009 A Surface-Micromachined MEMS Acoustic Sensor with X-Shape Bottom Electrode Anchor   Jaewoo Lee  SENSORS 2009, pp.1313-1316 12 원문
Conference 2008 Surface-Micromachined Deep Back Chamber MEMS Acoustic Sensor Using Two Sacrificial Layers   Jaewoo Lee  SENSORS 2008, pp.569-572 5 원문
특허 검색결과
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연구보고서 검색결과
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