Subjects : Gas composition
| Type | Year | Title | Cited | Download |
|---|---|---|---|---|
| Journal | 2005 | Effect of Plasma on Characteristics of Zirconium Oxide Films Deposited by Plasma-Enhanced Atomic Layer Deposition Sun Jin Yun Electrochemical and Solid-State Letters, v.8, no.11, pp.F47-F50 | 27 | 원문 |
| Journal | 2002 | Characterization of Via Etching in CHF3/CF4 Magnetically Enhanced Reactive Ion Etching Using Neural Networks Kwon Sung-Ku ETRI Journal, v.24, no.3, pp.211-220 | 10 | 원문 |
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| Type | Year | Research Project | Primary Investigator | Download |
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