Subjects : Nitrogen-containing
Type | Year | Title | Cited | Download |
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Journal | 2009 | Kinetics of Chemical Changes in Phenol Formaldehyde Based Polymeric Films Etched in N2 O and O2 Inductively Coupled Plasmas: A Comparative Study 권광호 Japanese Journal of Applied Physics, v.48, no.8, pp.1-4 | 2 | 원문 |
Journal | 2008 | Influence of Ar and NH3 Plasma Treatment on Surface of Poly(monochloro-para-xylylene) Dielectric Films Processed in Oxygen Plasma Dmitriy A. Shutov Japanese Journal of Applied Physics, v.47, no.8, pp.6970-6973 | 10 | 원문 |
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