Subject

Subjects : piezoresistive pressure sensor

  • Articles (2)
  • Patents (1)
  • R&D Reports (0)
논문 검색결과
Type Year Title Cited Download
Journal 2016 Surface Micromachined Pressure Sensor with Substrate Internal Vacuum Cavity   Chang Han Je  ETRI Journal, v.38, no.4, pp.685-694 2 원문
Conference 2015 MEMS Piezoresistive Pressure Sensor with Substrate Inner Cavity   Chang Han Je  COMS Conference 2015, pp.1-2
특허 검색결과
Status Year Patent Name Country Family Pat. KIPRIS
Registered 2010 MICRO PIEZORESISTIVE PRESSURE SENSOR AND MANUFACTURING METHOD THEREOF UNITED STATES
연구보고서 검색결과
Type Year Research Project Primary Investigator Download
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