Subjects : plate anchor
Type | Year | Title | Cited | Download |
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Conference | 2013 | A Bottom-Inlet type MEMS Acoustic Sensor with Wheel-Shaped Back-Plate Anchor Jaewoo Lee EUROCON 2013, pp.2116-2122 | 0 | 원문 |
Conference | 2011 | A Surface-Micromachined MEMS Acoustic Sensor with Back-Plate Anchors of 100 μm Depth Jaewoo Lee SENSORS 2011, pp.1-4 | 6 | 원문 |
Status | Year | Patent Name | Country | Family Pat. | KIPRIS |
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Type | Year | Research Project | Primary Investigator | Download |
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