|
Journal
|
2013 |
Dry Etching Characteristics of Indium Zinc Oxide Thin Films in Adaptive Coupled Plasma
Woo Jong Chang Transactions on Electrical and Electronic Materials, v.14, no.4, pp.216-220 |
1 |
원문
|
|
Journal
|
2011 |
Dual Etch Processes of Via and Metal Paste Filling for Through Silicon Via Process
함용현 Thin Solid Films, v.519, no.20, pp.6727-6731 |
26 |
원문
|
|
Journal
|
2002 |
Characterization of Via Etching in CHF3/CF4 Magnetically Enhanced Reactive Ion Etching Using Neural Networks
Kwon Sung-Ku ETRI Journal, v.24, no.3, pp.211-220 |
10 |
원문
|