Subject

Subjects : Silicate film

  • Articles (3)
  • Patents (0)
  • R&D Reports (0)
논문 검색결과
Type Year Title Cited Download
Journal 2010 In-Situ Transmission Electron Microscopy Investigation of the Interfacial Reaction between Er and SiO2 Films   최철종  Materials Transactions, v.51, no.4, pp.793-798 3 원문
Journal 2007 Electrical and Structural Properties of High-k Er-silicate Gate Dielectric Formed by Interfacial Reaction between Er and SiO2 Films   Choi Chel-Jong  Applied Physics Letters, v.91, no.1, pp.1-3 17 원문
Journal 2006 Rare-Earth Gate Oxides for GaAs MOSFET Application   권광호  Applied Surface Science, v.252, no.21, pp.7624-7630 4 원문
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