Subject

Subjects : Radio frequency (RF) magnetron sputtering

  • Articles (2)
  • Patents (0)
  • R&D Reports (0)
논문 검색결과
Type Year Title Cited Download
Journal 2013 Electrical and optical properties of radio frequency magnetron-sputtered lightly aluminum-doped zinc oxide thin films deposited in hydrogen–argon gas   Kim Kyung Hyun  Thin Solid Films, v.540, pp.142-145 4 원문
Journal 2009 Growth and Properties of Sb-doped ZnMgO Thin Films Deposited Usingrf Magnetron Sputtering   Chung Sung Mook  Journal of the Korean Physical Society, v.55, no.3, pp.1123-1127 2 원문
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