Subjects : Stopper system
| Type | Year | Title | Cited | Download |
|---|---|---|---|---|
| Conference | 2007 | Sensing gap reconfigurable capacitive type MEMS accelerometer Chang Han Je Device and Process Technologies for Microelectronics, MEMS, Photonics, and Nanotechnology IV (SPIE 6800), v.6800, pp.1-7 | 5 | 원문 |
| Status | Year | Patent Name | Country | Family Pat. | KIPRIS |
|---|---|---|---|---|---|
| Registered | 2009 | High sensitivity MEMS capacitive accelerometer using stopper system | UNITED STATES |
| Type | Year | Research Project | Primary Investigator | Download |
|---|---|---|---|---|
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