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Journal
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2006 |
Micromachined Air-Gap Structure MEMS Acoustic Sensor using Reproducible High-Speed Lateral Etching and CMP Process
Sang Choon Ko Journal of Micromechanics and Microengineering, v.16, no.10, pp.2071-2076 |
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원문
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Conference
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2006 |
Controlled Patterning of Enzymes and Antibodies on the MEMS Device based on the Heat-Sensitive Structural Transition of Poly(N-Isopropylacrylamide)
최형길 International Society of Electrochemistry (ISE) 2006 (Spring), pp.1-1 |
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Conference
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2006 |
Surface Micromachined MEMS Devices by Novel Dry Release Process
Jang Won Ick 한국반도체 학술 대회 (KCS) 2006, pp.1-2 |
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