Subjects :
Electron temperature
논문 검색결과
| Type |
Year |
Title |
Cited |
Download |
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Journal
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2010 |
Effect of Gas Mixing Ratio on Etch Behavior of Y2O3 Thin Films in Cl2/Ar and BCl3/Ar Inductively Coupled Plasmas
김문근 Japanese Journal of Applied Physics, v.49, no.8 PART 2, pp.1-6 |
5 |
원문
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|
Journal
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2008 |
Model-Based Analysis of Plasma Parameters and Active Species Kinetics in Cl2/X (X=Ar, He, N2) Inductively Coupled Plasmas
Alexander Efremov Journal of the Electrochemical Society, v.155, no.12, pp.D777-D782 |
72 |
원문
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|
Journal
|
2002 |
Self-Consistent Subband Calculations of AlGaN/GaN Single Heterojunctions
Lee Kyu-Seok ETRI Journal, v.24, no.4, pp.270-279 |
40 |
원문
|
|
Journal
|
2001 |
Optical characteristics of silicon semiconductor bridges under high current density conditions
Kim Jongdae IEEE Transactions on Electron Devices, v.48, no.5, pp.852-857 |
24 |
원문
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특허 검색결과
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Family Pat. |
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연구보고서 검색결과
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