Subjects : comb electrodes
| Type | Year | Title | Cited | Download |
|---|---|---|---|---|
| Journal | 2011 | High-Resolution Capacitive Microinclinometer With Oblique Comb Electrodes Using (110) Silicon 정대훈 IEEE Journal of Microelectromechanical Systems, v.20, no.6, pp.1269-1276 | 12 | 원문 |
| Conference | 2009 | Novel Micro Capacitive Inclinometer with Oblique Comb Electrode and Suspension Spring Aligned Parallel to {111} Vertical Planes of (110) Silicon 정대훈 International Conference on Micro Electro Mechanical Systems (MEMS) 2009, pp.797-800 | 4 | 원문 |
| Conference | 2007 | Sensing gap reconfigurable capacitive type MEMS accelerometer Chang Han Je Device and Process Technologies for Microelectronics, MEMS, Photonics, and Nanotechnology IV (SPIE 6800), v.6800, pp.1-7 | 5 | 원문 |
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| Type | Year | Research Project | Primary Investigator | Download |
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