Subjects : KOH solution
Type | Year | Title | Cited | Download |
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Conference | 2013 | Sub-22 nm Silicon Template Nanofabrication by Advanced Spacer Patterning Technique for NIL Applications Park Jong-Moon Alternative Lithographic Technologies V (SPIE 8680), pp.1-8 | 0 | 원문 |
Journal | 2009 | Adjusting Resonant Wavelengths and Spectral Shapes of Ring Resonators using a Cladding SiN Layer or KOH Solution Park Sahnggi Optics Express, v.17, no.14, pp.11884-11891 | 8 | 원문 |
Status | Year | Patent Name | Country | Family Pat. | KIPRIS |
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Type | Year | Research Project | Primary Investigator | Download |
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