Subjects : Gas plasma

Articles (3)
Patents (0)
R&D Reports (0)

논문 검색결과
Type	Year	Title	Cited	Download
Conference	2014	Normally-off GaN MIS-HEMT Using CF4 Plasma Gate Recess Park Young Rak International Workshop on Nitride Semiconductors (IWN) 2014, pp.1-2
Journal	2010	Surface Characteristics of Parylene-C Films in an Inductively Coupled O2/CF4 Gas Plasma Ham Yong-Hyun Thin Solid Films, v.518, no.22, pp.6378-6381	17
Conference	2009	Study on the Surface Characteristics of Parylene-C Films in Inductively Coupled O2/CF4 Gas Plasma Ham Yong-Hyun International Meeting on Information Display (IMID) 2009, pp.1399-1401

특허 검색결과
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연구보고서 검색결과
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