Subject

Subjects : Gate fabrication

  • Articles (2)
  • Patents (0)
  • R&D Reports (0)
논문 검색결과
Type Year Title Cited Download
Journal 2023 Optimized recess etching criteria for T-gate fabrication achieving ft = 290 GHz at Lg = 124 nm in metamorphic high electron mobility transistor with In0.7Ga0.3As channel   Jong Yul Park  Electronics Letters, v.59, no.14, pp.1-3 2 원문
Journal 2015 Al2O3 Surface Passivation and MOS-Gate Fabrication on AlGaN/GaN High-Electron-Mobility Transistors without Al2O3 Etching Process   Kim Jeong-Jin  Japanese Journal of Applied Physics, v.54, no.3, pp.1-3 1 원문
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