Subjects : Micromachined sensor
| Type | Year | Title | Cited | Download |
|---|---|---|---|---|
| Conference | 2014 | The Effect of Back-Chamber Volume on the Surface Micromachined Acoustic Sensor Chang Han Je SENSORS 2014, pp.1-4 | 2 | 원문 |
| Journal | 2007 | Development of a MEMS Structure for an Infrared Focal Plane Array Seong-Mok Cho 전기학회논문지, v.56, no.8, pp.1461-1465 |
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| Type | Year | Research Project | Primary Investigator | Download |
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