Subjects : Lumped parameters
| Type | Year | Title | Cited | Download |
|---|---|---|---|---|
| Journal | 2019 | Wafer-Level-Based Open-Circuit Sensitivity Model from Theoretical ALEM and Empirical OSCM Parameters for a Capacitive MEMS Acoustic Sensor Jaewoo Lee Sensors, v.19, no.3, pp.1-14 | 2 | 원문 |
| Journal | 2015 | A Concave-Patterned TiN/PECVD-Si3N4 /TiN Diaphragm MEMS Acoustic Sensor Based on a Polyimide Sacrificial Layer Jaewoo Lee Journal of Micromechanics and Microengineering, v.25, no.12, pp.1-13 | 8 | 원문 |
| Journal | 2014 | Bottom‐inlet‐type micro‐electro‐mechanical system acoustic sensors based on two polyimide/amorphous‐Si sacrificial layers Jaewoo Lee IET Micro & Nano Letters, v.9, no.12, pp.845-849 | 1 | 원문 |
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| Type | Year | Research Project | Primary Investigator | Download |
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