Subject

Subjects : Lumped parameters

  • Articles (3)
  • Patents (0)
  • R&D Reports (0)
논문 검색결과
Type Year Title Cited Download
Journal 2019 Wafer-Level-Based Open-Circuit Sensitivity Model from Theoretical ALEM and Empirical OSCM Parameters for a Capacitive MEMS Acoustic Sensor   Jaewoo Lee  Sensors, v.19, no.3, pp.1-14 2 원문
Journal 2015 A Concave-Patterned TiN/PECVD-Si3N4 /TiN Diaphragm MEMS Acoustic Sensor Based on a Polyimide Sacrificial Layer   Jaewoo Lee  Journal of Micromechanics and Microengineering, v.25, no.12, pp.1-13 8 원문
Journal 2014 Bottom‐inlet‐type micro‐electro‐mechanical system acoustic sensors based on two polyimide/amorphous‐Si sacrificial layers   Jaewoo Lee  IET Micro & Nano Letters, v.9, no.12, pp.845-849 1 원문
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