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Registered DUAL-SIDE MICRO GAS SENSOR AND METHOD OF FABRICATING THE SAME

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Inventors
Lee Hyung-Kun, Moon Seungeon, Choi Nak Jin, Yang Woo Seok, Kim Jongdae, Jaewoo Lee
Application No.
13909477 (2013.06.04)
Publication No.
20140175570 (2014.06.26)
Registration No.
8912613 (2014.12.16)
Country
UNITED STATES
Project Code
12MB2400, Development of self-powered smart sensor node platform for smart&green building, Kim Jongdae
Abstract
Provided are a dual-side micro gas sensor and a method of fabricating the same. The sensor may include an elastic layer, a heat-generating resistor layer on the elastic layer, an interlayered insulating layer on the heat-generating resistor layer, an upper sensing layer on the interlayered insulating layer, and a lower sensing layer provided below the elastic layer to face the heat-generating resistor layer, thereby reducing heat loss of the heat-generating resistor layer.
KSP Keywords
Heat loss, Micro gas sensor, Sensing layer, elastic layer, gas sensors, insulating layer
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Status Patent Country KIPRIS
Registered dual side micro gas sensor and manufacturing method of the same KOREA KIPRIS