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Registered DUAL-SIDE MICRO GAS SENSOR AND METHOD OF FABRICATING THE SAME
- Inventors
- Lee Hyung-Kun, Moon Seungeon, Choi Nak Jin, Yang Woo Seok, Kim Jongdae, Jaewoo Lee
- Application No.
- 13909477 (2013.06.04)
- Publication No.
- 20140175570 (2014.06.26)
- Registration No.
- 8912613 (2014.12.16)
- Country
- UNITED STATES
- Project Code
- 12MB2400, Development of self-powered smart sensor node platform for smart&green building, Kim Jongdae
- Abstract
- Provided are a dual-side micro gas sensor and a method of fabricating the same. The sensor may include an elastic layer, a heat-generating resistor layer on the elastic layer, an interlayered insulating layer on the heat-generating resistor layer, an upper sensing layer on the interlayered insulating layer, and a lower sensing layer provided below the elastic layer to face the heat-generating resistor layer, thereby reducing heat loss of the heat-generating resistor layer.
- KSP Keywords
- Heat loss, Micro gas sensor, Sensing layer, elastic layer, gas sensors, insulating layer
- Family
| Status | Patent | Country | KIPRIS |
|---|---|---|---|
| Registered | dual side micro gas sensor and manufacturing method of the same | KOREA | KIPRIS |